Invention Application
US20120325664A1 NANOSENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
纳米传感器及其制造方法

NANOSENSOR AND METHOD OF MANUFACTURING THE SAME
Abstract:
A nanosensor comprising a substrate having a hole; a first insulating layer disposed on the substrate and having a first nanopore at a location corresponding to the hole in the substrate; first and second electrodes disposed on the first insulating layer, wherein the first and second electrodes are spaced apart from each other with the first nanopore positioned therebetween; a first electrode pad disposed on at least a portion of the first electrode; a second electrode pad disposed on at least a portion of the second electrode; and a protective layer disposed on at least a portion of the first and second electrode pads; as well as a method for manufacturing same.
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