发明申请
US20120326346A1 SHEET-SHAPED MOLD POSITION DETECTION DEVICE, TRANSFER DEVICE AND TRANFER METHOD 有权
片材形状位置检测装置,转印装置和转印方法

SHEET-SHAPED MOLD POSITION DETECTION DEVICE, TRANSFER DEVICE AND TRANFER METHOD
摘要:
A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position dejection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M.
信息查询
0/0