Invention Application
- Patent Title: EXTERNAL FORCE DETECTION APPARATUS AND EXTERNAL FORCE DETECTION SENSOR
- Patent Title (中): 外力检测装置和外力检测传感器
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Application No.: US13528838Application Date: 2012-06-21
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Publication No.: US20120326566A1Publication Date: 2012-12-27
- Inventor: MITSUAKI KOYAMA , TAKERU MUTOH , HIROKI IWAI , RYOICHI ICHIKAWA
- Applicant: MITSUAKI KOYAMA , TAKERU MUTOH , HIROKI IWAI , RYOICHI ICHIKAWA
- Applicant Address: JP TOKYO
- Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee Address: JP TOKYO
- Priority: JP2011-140573 20110624
- Main IPC: H01L41/047
- IPC: H01L41/047

Abstract:
In an external force detection apparatus, a crystal plate is cantilevered within a container. Excitation electrodes are formed on the top surface and the bottom surface of the crystal plate. A movable electrode is formed on a distal end on the bottom surface of the crystal plate and is connected to the excitation electrode on the bottom surface via an extraction electrode. A fixed electrode is provided on the bottom of the container to oppose the movable electrode. The excitation electrode on the top surface and the fixed electrode are connected to an oscillating circuit. When an external force acts on the crystal plate to bend it, the capacitance between the movable electrode and the fixed electrode changes, and this capacitance change is captured as a change in the oscillating frequency of the crystal plate.
Public/Granted literature
- US08890391B2 External force detection apparatus and external force detection sensor Public/Granted day:2014-11-18
Information query
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