发明申请
US20130001280A1 METAL NANOINK AND PROCESS FOR PRODUCING THE METAL NANOINK, AND DIE BONDING METHOD AND DIE BONDING APPARATUS USING THE METAL NANOINK
审中-公开
金属纳米结构和金属纳米结晶的制造工艺和使用金属纳米结构的DIE结合方法和DIE结合装置
- 专利标题: METAL NANOINK AND PROCESS FOR PRODUCING THE METAL NANOINK, AND DIE BONDING METHOD AND DIE BONDING APPARATUS USING THE METAL NANOINK
- 专利标题(中): 金属纳米结构和金属纳米结晶的制造工艺和使用金属纳米结构的DIE结合方法和DIE结合装置
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申请号: US13590775申请日: 2012-08-21
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公开(公告)号: US20130001280A1公开(公告)日: 2013-01-03
- 发明人: Toru MAEDA , Tetsuro TANIKAWA , Akinobu TERAMOTO , Masaaki ODA
- 申请人: Toru MAEDA , Tetsuro TANIKAWA , Akinobu TERAMOTO , Masaaki ODA
- 申请人地址: JP Tokyo JP Kanagawa JP Miyagi
- 专利权人: SHINKAWA LTD.,ULVAC, INC.,TOHOKU UNIVERSITY
- 当前专利权人: SHINKAWA LTD.,ULVAC, INC.,TOHOKU UNIVERSITY
- 当前专利权人地址: JP Tokyo JP Kanagawa JP Miyagi
- 优先权: JP2008-200083 20080801
- 主分类号: B23K1/20
- IPC分类号: B23K1/20 ; B23K3/06
摘要:
Metal nanoink for bonding an electrode of a semiconductor die and an electrode of a substrate and/or bonding an electrode of a semiconductor die and an electrode of another semiconductor die by sintering under pressure is produced by injecting oxygen into an organic solvent in the form of oxygen nanobubbles or oxygen bubbles either before or after metal nanoparticles whose surfaces are coated with a dispersant are mixed into the organic solvent. Bumps are formed on the electrode of the semiconductor die and the electrode of the substrate by ejecting microdroplets of the metal nanoink onto the electrodes, the semiconductor die is turned upside down and overlapped in alignment over the substrate, and then, the metal nanoparticles of the bumps are sintered under pressure by pressing and heating the bumps between the electrodes. As a result, generation of voids during sintering under pressure is minimized.
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