发明申请
- 专利标题: MASTER FOR PRODUCING STAMPER
- 专利标题(中): 主要生产冲压器
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申请号: US13613667申请日: 2012-09-13
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公开(公告)号: US20130004724A1公开(公告)日: 2013-01-03
- 发明人: Saori Kashiwada , Yuichi Ohsawa , Junichi Ito , Chikayoshi Kamata , Yoshiyuki Kamata
- 申请人: Saori Kashiwada , Yuichi Ohsawa , Junichi Ito , Chikayoshi Kamata , Yoshiyuki Kamata
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 主分类号: B32B3/30
- IPC分类号: B32B3/30 ; B32B9/04 ; B32B17/06
摘要:
In one embodiment, there is provided a master for producing a stamper. The master includes: a substrate made of a first material and comprising a first surface, wherein the first surface of the substrate is formed with a groove; a first layer made of a second material and formed in the groove, wherein the second material is different from the first material, and wherein a surface of the first layer is substantially flush with the first surface of substrate; and a projection portion formed on at least one of the first surface of the substrate and the surface of the first layer. The first material is silicon and the second material is selected from silicon oxide, aluminum oxide, titanium oxide, and glass.
公开/授权文献
- US08431210B2 Master for producing stamper 公开/授权日:2013-04-30