发明申请
- 专利标题: POLISHING PAD
- 专利标题(中): 抛光垫
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申请号: US13607125申请日: 2012-09-07
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公开(公告)号: US20130005228A1公开(公告)日: 2013-01-03
- 发明人: Atsushi Kazuno , Kazuyuki Ogawa , Masahiko Nakamori , Takatoshi Yamada , Tetsuo Shimomura
- 申请人: Atsushi Kazuno , Kazuyuki Ogawa , Masahiko Nakamori , Takatoshi Yamada , Tetsuo Shimomura
- 申请人地址: JP Osaka-shi
- 专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人地址: JP Osaka-shi
- 优先权: JP2005-144292 20050517; JP2005-144304 20050517; JP2005-144318 20050517
- 主分类号: B24D3/00
- IPC分类号: B24D3/00 ; B24D11/00
摘要:
A polishing pad generates very few scratches on a surface of a polishing object, and is excellent in planarization property. The polishing pad has a high polishing rate and is excellent in planarization property. The polishing pad grooves become very little clogged with abrasive grains or polishing swarf during polishing and, even when continuously used for a long period of time, the polishing rate is scarcely reduced.
公开/授权文献
- US08779020B2 Polishing pad 公开/授权日:2014-07-15
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