发明申请
- 专利标题: SURFACE TREATMENT APPARATUS
- 专利标题(中): 表面处理设备
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申请号: US13636874申请日: 2011-03-17
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公开(公告)号: US20130008610A1公开(公告)日: 2013-01-10
- 发明人: Yu Yan Jiang , Masahide Inagaki , Kenji Nakashima , Soichiro Makino , Nariaki Horinouchi , Takahiro Ito
- 申请人: Yu Yan Jiang , Masahide Inagaki , Kenji Nakashima , Soichiro Makino , Nariaki Horinouchi , Takahiro Ito
- 申请人地址: JP Toyota-shi, Aichi-ken JP Nagakute-shi, Aichi-ken
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA,KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA,KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- 当前专利权人地址: JP Toyota-shi, Aichi-ken JP Nagakute-shi, Aichi-ken
- 优先权: JP2010-071493 20100326
- 国际申请: PCT/JP2011/057269 WO 20110317
- 主分类号: B05C13/02
- IPC分类号: B05C13/02 ; C23C16/458
摘要:
A surface treatment apparatus in which a disk-like sample-holding plate is provided inside an enclosure constituting a cylindrical circumferential wall. A cylindrical portion in an upper portion of the enclosure constitutes a material fluid supplying channel, and a channel provided on the lateral side of the sample-holding plate in the enclosure and shaped spreading as it goes farther from the cylindrical portion constitutes a fluid discharge channel. The fluid discharge channel employs a parabola curve or the like in which the position of the upper end of the outmost circumference of the sample-holding plate is defined as a focus position and the position of the upper end of the outlet that is symmetrically opposite to the focus position is defined as a reference position.
公开/授权文献
- US09243326B2 Surface treatment apparatus 公开/授权日:2016-01-26