发明申请
US20130011319A1 APPARATUS FOR MIXING VAPORIZED PRECURSOR AND GAS AND METHOD THEREFOR
有权
用于混合蒸发前体和气体及其方法的装置
- 专利标题: APPARATUS FOR MIXING VAPORIZED PRECURSOR AND GAS AND METHOD THEREFOR
- 专利标题(中): 用于混合蒸发前体和气体及其方法的装置
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申请号: US13176804申请日: 2011-07-06
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公开(公告)号: US20130011319A1公开(公告)日: 2013-01-10
- 发明人: Lewis A. Bernstein , Dana Craig Bookbinder , Jason A. Dillard , Jennifer L. Porter , Balram Suman , Pushkar Tandon
- 申请人: Lewis A. Bernstein , Dana Craig Bookbinder , Jason A. Dillard , Jennifer L. Porter , Balram Suman , Pushkar Tandon
- 主分类号: C01B33/12
- IPC分类号: C01B33/12 ; B01J19/00
摘要:
An apparatus for mixing a vaporized precursor with a gas for producing silica particles is provided. The apparatus includes a mixer housing, a precursor delivery chamber having an output in communication with the mixer housing for delivering a vaporized precursor in the mixer housing, and an oxidizing gas delivery chamber having an output in communication with the mixer housing for delivering an oxidizing gas to be mixed with the vaporized precursor. The apparatus further includes a flashback member disposed within the mixer housing and between the output of the precursor delivery chamber and the output of the oxidizing gas delivery chamber. The flashback member is located at a minimum distance from the output of the oxidizing gas delivery chamber defined by Lminimum (cm)=0.453 U (Re)−0.5567, wherein U is the flow rate in cm/sec of precursor and Re is the flow Reynolds number. The flashback member may include a tapered surface on at least one side to reduce recirculation of vaporized gas.
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