发明申请
- 专利标题： METHOD FOR MANUFACTURING HIGH EFFICIENCY LIGHT-EMITTING DIODES
- 专利标题（中）： 制造高效发光二极管的方法
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申请号： US13618774申请日： 2012-09-14
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公开(公告)号： US20130011949A1公开(公告)日： 2013-01-10
- 发明人: Chien-Kai CHUNG , Ta-Cheng Hsu , Jung-Min Hwang , Min-Hsun Hsieh , Ya-Lan Yang , De-Shan Kuo , Tsun-Kai Ko , Chien-Fu Shen , Ting-Chia Ko , Schang-Jin Hon
- 申请人： Chien-Kai CHUNG , Ta-Cheng Hsu , Jung-Min Hwang , Min-Hsun Hsieh , Ya-Lan Yang , De-Shan Kuo , Tsun-Kai Ko , Chien-Fu Shen , Ting-Chia Ko , Schang-Jin Hon
- 申请人地址： TW Hsinchu
- 专利权人： Epistar Corporation
- 当前专利权人： Epistar Corporation
- 当前专利权人地址： TW Hsinchu
- 主分类号： H01L33/02
- IPC分类号： H01L33/02
摘要：
A method of manufacturing a light-emitting device comprising the steps of cutting a substrate by a laser beam to form a cavity in the substrate and generate a by-product directly on the substrate by the cutting, and removing the by-product by a chemical solution containing an acid under a predetermined cleaning temperature.
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