发明申请
- 专利标题： METHOD OF MANUFACTURING A PIEZOELECTRIC VIBRATOR
- 专利标题（中）： 制造压电振动器的方法
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申请号： US13612270申请日： 2012-09-12
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公开(公告)号： US20130014361A1公开(公告)日： 2013-01-17
- 发明人: Tsuyoshi OHSHIMA , Shin HASEGAWA , Noriyuki WATANABE
- 申请人： Tsuyoshi OHSHIMA , Shin HASEGAWA , Noriyuki WATANABE
- 申请人地址： JP Tokyo
- 专利权人： SEIKO EPSON CORPORATION
- 当前专利权人： SEIKO EPSON CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2005-027838 20050203
- 主分类号： H01L41/22
- IPC分类号： H01L41/22
摘要：
A piezoelectric vibration element is provided which includes a piezoelectric substrate formed of a thickness slip based piezoelectric material and a metal layer formed on a surface of the piezoelectric substrate. In the piezoelectric vibration element, a surface of the metal layer is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair.
公开/授权文献
- US08732924B2 Method of manufacturing a piezoelectric vibrator 公开/授权日：2014-05-27
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