发明申请
- 专利标题: TEMPERATURE SENSOR ELEMENT, METHOD FOR MANUFACTURING SAME, AND TEMPERATURE SENSOR
- 专利标题(中): 温度传感器元件,其制造方法和温度传感器
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申请号: US13639327申请日: 2011-04-27
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公开(公告)号: US20130020670A1公开(公告)日: 2013-01-24
- 发明人: Tsunenobu Hori , Kaoru Kuzuoka , Chiaki Ogawa , Motoki Satou , Katsunori Yamada , Takao Kobayashi
- 申请人: Tsunenobu Hori , Kaoru Kuzuoka , Chiaki Ogawa , Motoki Satou , Katsunori Yamada , Takao Kobayashi
- 申请人地址: JP Nagakute-shi, Aichi-ken JP Kariya-city, Aichi-pref.
- 专利权人: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,DENSO CORPORATION
- 当前专利权人: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,DENSO CORPORATION
- 当前专利权人地址: JP Nagakute-shi, Aichi-ken JP Kariya-city, Aichi-pref.
- 优先权: JP2010-104413 20100428; JP2011-084154 20110406
- 国际申请: PCT/JP2011/060310 WO 20110427
- 主分类号: H01L35/14
- IPC分类号: H01L35/14 ; H01L35/34
摘要:
A temperature sensing element includes a thermistor composed of Si-base ceramics and a pair of metal electrodes bonded onto the surfaces of the thermistor. The metal electrodes contain Cr and a metal element α having a Si diffusion coefficient higher than that of Cr. A diffusion layer is formed in a bonding interface between the thermistor and each metal electrode, the diffusion layer including a silicide of the metal element α in a crystal grain boundary of the Si-base ceramics. A temperature sensor including the diffusion layers is provided. Owing to the diffusion layers, the temperature sensor ensures heat resistance and bonding reliability and enables temperature detection with high accuracy in a temperature range, in particular, of from −50° C. to 1050° C.
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