发明申请
US20130027795A1 SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING
审中-公开
用于提供具有高硬度和低惯性参与化学蚀刻的镜子的系统和方法
- 专利标题： SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING
- 专利标题（中）： 用于提供具有高硬度和低惯性参与化学蚀刻的镜子的系统和方法
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申请号： US13560023申请日： 2012-07-27
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公开(公告)号： US20130027795A1公开(公告)日： 2013-01-31
- 发明人: David C. Brown
- 申请人： David C. Brown
- 申请人地址： US MA Bedford
- 专利权人： GSI GROUP CORPORATION
- 当前专利权人： GSI GROUP CORPORATION
- 当前专利权人地址： US MA Bedford
- 主分类号： G02B7/182
- IPC分类号： G02B7/182 ; B44C1/22
摘要：
A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.