Invention Application
- Patent Title: DICING PROCESS AND DICING APPARATUS
- Patent Title (中): 定义流程和定位设备
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Application No.: US13540781Application Date: 2012-07-03
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Publication No.: US20130029476A1Publication Date: 2013-01-31
- Inventor: Chien-Sen WENG , Mong-Yeng Xing , Yu-Ching Chang , Wei-Chang Yu , Yao-Hui Lin
- Applicant: Chien-Sen WENG , Mong-Yeng Xing , Yu-Ching Chang , Wei-Chang Yu , Yao-Hui Lin
- Applicant Address: TW Hsinchu
- Assignee: LEXTAR ELECTRONICS CORP.
- Current Assignee: LEXTAR ELECTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Priority: TW100126608 20110727
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
A dicing process is provided for cutting a wafer along a plurality of predetermined scribe lines into a plurality of dies that are releasably adhered to a release film. The dicing process includes: (a) disposing a wafer-breaking carrier on a supporting device, the wafer-breaking carrier having a chipping unit; (b) disposing the wafer above the supporting device such that the chipping unit is at a position corresponding to the scribe lines; and (c) adhering a release surface of the release film to the wafer by applying a force to the release film to contact the chipping unit of the wafer-breaking carrier with the wafer, such that the wafer is split along the scribe lines into the dies.
Information query
IPC分类: