发明申请
- 专利标题: NON-PLANAR GERMANIUM QUANTUM WELL DEVICES
- 专利标题(中): 非平面德国量子井设备
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申请号: US13647952申请日: 2012-10-09
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公开(公告)号: US20130032783A1公开(公告)日: 2013-02-07
- 发明人: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Mark Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- 申请人: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Mark Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/06 ; H01L21/336
摘要:
Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
公开/授权文献
- US08575596B2 Non-planar germanium quantum well devices 公开/授权日:2013-11-05
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