Invention Application
US20130032893A1 SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES AND NON-FETS WITH DIFFERENT HEIGHT BY EARLY ADAPTATION OF GATE STACK TOPOGRAPHY 审中-公开
包含金属栅极电极结构和不同高度的非FET的半导体器件通过栅格堆叠拓扑的早期适应

  • Patent Title: SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES AND NON-FETS WITH DIFFERENT HEIGHT BY EARLY ADAPTATION OF GATE STACK TOPOGRAPHY
  • Patent Title (中): 包含金属栅极电极结构和不同高度的非FET的半导体器件通过栅格堆叠拓扑的早期适应
  • Application No.: US13550693
    Application Date: 2012-07-17
  • Publication No.: US20130032893A1
    Publication Date: 2013-02-07
  • Inventor: Rohit PalGeorge Mulfinger
  • Applicant: Rohit PalGeorge Mulfinger
  • Applicant Address: KY Grand Cayman
  • Assignee: GLOBALFOUNDRIES INC.
  • Current Assignee: GLOBALFOUNDRIES INC.
  • Current Assignee Address: KY Grand Cayman
  • Priority: DE102011080439.0 20110804
  • Main IPC: H01L27/088
  • IPC: H01L27/088 H01L21/283
SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES AND NON-FETS WITH DIFFERENT HEIGHT BY EARLY ADAPTATION OF GATE STACK TOPOGRAPHY
Abstract:
Gate height scaling in sophisticated semiconductor devices may be implemented without requiring a redesign of non-transistor devices. To this end, the semiconductor electrode material may be adapted in its thickness above active regions and isolation regions that receive the non-transistor devices. Thereafter, the actual patterning of the adapted gate layer stack may be performed so as to obtain gate electrode structures of a desired height for improving, in particular, AC performance without requiring a redesign of the non-transistor devices.
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