Invention Application
US20130032893A1 SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES AND NON-FETS WITH DIFFERENT HEIGHT BY EARLY ADAPTATION OF GATE STACK TOPOGRAPHY
审中-公开
包含金属栅极电极结构和不同高度的非FET的半导体器件通过栅格堆叠拓扑的早期适应
- Patent Title: SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES AND NON-FETS WITH DIFFERENT HEIGHT BY EARLY ADAPTATION OF GATE STACK TOPOGRAPHY
- Patent Title (中): 包含金属栅极电极结构和不同高度的非FET的半导体器件通过栅格堆叠拓扑的早期适应
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Application No.: US13550693Application Date: 2012-07-17
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Publication No.: US20130032893A1Publication Date: 2013-02-07
- Inventor: Rohit Pal , George Mulfinger
- Applicant: Rohit Pal , George Mulfinger
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Priority: DE102011080439.0 20110804
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/283

Abstract:
Gate height scaling in sophisticated semiconductor devices may be implemented without requiring a redesign of non-transistor devices. To this end, the semiconductor electrode material may be adapted in its thickness above active regions and isolation regions that receive the non-transistor devices. Thereafter, the actual patterning of the adapted gate layer stack may be performed so as to obtain gate electrode structures of a desired height for improving, in particular, AC performance without requiring a redesign of the non-transistor devices.
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