发明申请
US20130047738A1 PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
审中-公开
带平面膜的平台,具有这种平台的压力传感器及其制造方法
- 专利标题: PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
- 专利标题(中): 带平面膜的平台,具有这种平台的压力传感器及其制造方法
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申请号: US13696453申请日: 2011-04-14
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公开(公告)号: US20130047738A1公开(公告)日: 2013-02-28
- 发明人: Anh Tuan Tham , Dieter Stolze , Rafael Teipen
- 申请人: Anh Tuan Tham , Dieter Stolze , Rafael Teipen
- 申请人地址: DE Maulburg
- 专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人地址: DE Maulburg
- 优先权: DE102010028773.3 20100507
- 国际申请: PCT/EP2011/055946 WO 20110414
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; C01B33/02 ; G01L9/00
摘要:
A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by means of laser ablation. Preferably, this is followed by oxidizing the ablated surface and then etching the oxidized surface. In an example of the invention, a resulting pressure sensor comprises two platforms, each with a membrane bed having a contour for supporting a measuring membrane, wherein the contour essentially corresponds to a bend line of the measuring membrane.
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