发明申请
US20130052783A1 Methods of Forming Stressed Silicon-Carbon Areas in an NMOS Transistor
有权
在NMOS晶体管中形成强化硅 - 碳区域的方法
- 专利标题: Methods of Forming Stressed Silicon-Carbon Areas in an NMOS Transistor
- 专利标题(中): 在NMOS晶体管中形成强化硅 - 碳区域的方法
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申请号: US13216921申请日: 2011-08-24
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公开(公告)号: US20130052783A1公开(公告)日: 2013-02-28
- 发明人: Stefan Flachowsky , Ralf Illgen , Thilo Scheiper , Jan Hoentschel
- 申请人: Stefan Flachowsky , Ralf Illgen , Thilo Scheiper , Jan Hoentschel
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/265
摘要:
Disclosed herein are various methods of forming stressed silicon-carbon areas in an NMOS transistor device. In one example, a method disclosed herein includes forming a layer of amorphous carbon above a surface of a semiconducting substrate comprising a plurality of N-doped regions and performing an ion implantation process on the layer of amorphous carbon to dislodge carbon atoms from the layer of amorphous carbon and to drive the dislodged carbon atoms into the N-doped regions in the substrate.
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