发明申请
US20130052783A1 Methods of Forming Stressed Silicon-Carbon Areas in an NMOS Transistor 有权
在NMOS晶体管中形成强化硅 - 碳区域的方法

Methods of Forming Stressed Silicon-Carbon Areas in an NMOS Transistor
摘要:
Disclosed herein are various methods of forming stressed silicon-carbon areas in an NMOS transistor device. In one example, a method disclosed herein includes forming a layer of amorphous carbon above a surface of a semiconducting substrate comprising a plurality of N-doped regions and performing an ion implantation process on the layer of amorphous carbon to dislodge carbon atoms from the layer of amorphous carbon and to drive the dislodged carbon atoms into the N-doped regions in the substrate.
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