发明申请
- 专利标题: Substrate Storage Container
- 专利标题(中): 基材储存容器
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申请号: US13579898申请日: 2010-05-24
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公开(公告)号: US20130056388A1公开(公告)日: 2013-03-07
- 发明人: Tsuyoshi Nagashima
- 申请人: Tsuyoshi Nagashima
- 申请人地址: JP TOKYO
- 专利权人: MIRAIAL CO LTD
- 当前专利权人: MIRAIAL CO LTD
- 当前专利权人地址: JP TOKYO
- 国际申请: PCT/JP2010/058705 WO 20100524
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.
公开/授权文献
- US08910792B2 Substrate storage container 公开/授权日:2014-12-16
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