发明申请
- 专利标题: PLASMA GENERATION DEVICE
- 专利标题(中): 等离子体生成装置
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申请号: US13665313申请日: 2012-10-31
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公开(公告)号: US20130057145A1公开(公告)日: 2013-03-07
- 发明人: Yuji Ikeda , Hitoe Kaneko , Motoki Kawashima
- 申请人: Imagineering, Inc.
- 申请人地址: JP Kobe-shi
- 专利权人: IMAGINEERING, INC.
- 当前专利权人: IMAGINEERING, INC.
- 当前专利权人地址: JP Kobe-shi
- 优先权: JP2009-216275 20090917
- 主分类号: H05H1/46
- IPC分类号: H05H1/46
摘要:
A plasma generation device, including: an ionization unit that ionizes gas in a target space; an electromagnetic wave oscillator that oscillates an electromagnetic wave to be radiated to the target space; and an antenna that radiates the electromagnetic wave supplied from the electromagnetic wave oscillator to a gas ionization region in which gas ionized by the ionization unit is provided. The ionization unit ionizes gas and the antenna radiates the electromagnetic wave thereto to generate plasma. A plurality of strong electric field regions are formed around the antenna when the electromagnetic wave is supplied from the electromagnetic wave oscillator. The strong electric field region is a region stronger in electric field than the surrounding area. The ionization unit ionizes gas around the plurality of strong electric field regions, or gas around a plurality of regions in which immediately before strong electric fields come into existence.
公开/授权文献
- US08890410B2 Plasma generation device 公开/授权日:2014-11-18
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