发明申请
US20130057145A1 PLASMA GENERATION DEVICE 有权
等离子体生成装置

PLASMA GENERATION DEVICE
摘要:
A plasma generation device, including: an ionization unit that ionizes gas in a target space; an electromagnetic wave oscillator that oscillates an electromagnetic wave to be radiated to the target space; and an antenna that radiates the electromagnetic wave supplied from the electromagnetic wave oscillator to a gas ionization region in which gas ionized by the ionization unit is provided. The ionization unit ionizes gas and the antenna radiates the electromagnetic wave thereto to generate plasma. A plurality of strong electric field regions are formed around the antenna when the electromagnetic wave is supplied from the electromagnetic wave oscillator. The strong electric field region is a region stronger in electric field than the surrounding area. The ionization unit ionizes gas around the plurality of strong electric field regions, or gas around a plurality of regions in which immediately before strong electric fields come into existence.
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