发明申请
- 专利标题: MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR ORGANIC EL ELEMENT
- 专利标题(中): 有机EL元件的制造装置和制造方法
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申请号: US13696585申请日: 2011-05-02
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公开(公告)号: US20130059063A1公开(公告)日: 2013-03-07
- 发明人: Shinichi Kawato , Nobuhiro Hayashi , Tohru Sonoda , Satoshi Inoue
- 申请人: Shinichi Kawato , Nobuhiro Hayashi , Tohru Sonoda , Satoshi Inoue
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 优先权: JP2010-114556 20100518
- 国际申请: PCT/JP2011/060514 WO 20110502
- 主分类号: H05B33/10
- IPC分类号: H05B33/10 ; C23C16/04
摘要:
A vapor deposition source (60), a plurality of limiting plates (81) and a vapor deposition mask (70) are disposed in this order. A substrate spaced apart from the vapor deposition mask at a fixed interval is moved relative to the vapor deposition mask. Vapor deposition particles (91) discharged from vapor deposition source openings (61) of the vapor deposition source pass through between neighboring limiting plates, pass through mask openings (71) formed in the vapor deposition mask, and adhere to the substrate, whereby coating films (90) are formed. The limiting plates limit the incidence angle of the vapor deposition particles that enter the mask openings, as viewed in the relative movement direction of the substrate. In this way, an organic EL element can be formed on a large-sized substrate without increasing the pixel pitch or reducing the aperture ratio.