Invention Application
- Patent Title: METHOD OF PRODUCING COATED MEMBER
- Patent Title (中): 制造涂层成员的方法
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Application No.: US13696921Application Date: 2011-05-12
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Publication No.: US20130059093A1Publication Date: 2013-03-07
- Inventor: Masahiro Suzuki , Kazuyoshi Yamakawa , Toshiyuki Saito
- Applicant: Masahiro Suzuki , Kazuyoshi Yamakawa , Toshiyuki Saito
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: JTEKT CORPORATION
- Current Assignee: JTEKT CORPORATION
- Current Assignee Address: JP Osaka-shi, Osaka
- Priority: JP2010-124552 20100531
- International Application: PCT/JP2011/060977 WO 20110512
- Main IPC: C23C16/30
- IPC: C23C16/30

Abstract:
The coated member production method includes a DLC film forming step of introducing a feedstock gas containing a carbon compound and an oxygen-containing organic silicon compound into a treatment chamber in which a base is accommodated, and applying a voltage to the base at a treatment pressure of not lower than 100 Pa and not higher than 400 Pa to generate plasma to form a DLC film on a surface of the base. Hexamethyldisiloxane, for example, is used as the oxygen-containing organic silicon compound. A DC pulse voltage, for example, is applied to the base in the DLC film forming step.
Information query
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