Invention Application
US20130059093A1 METHOD OF PRODUCING COATED MEMBER 审中-公开
制造涂层成员的方法

METHOD OF PRODUCING COATED MEMBER
Abstract:
The coated member production method includes a DLC film forming step of introducing a feedstock gas containing a carbon compound and an oxygen-containing organic silicon compound into a treatment chamber in which a base is accommodated, and applying a voltage to the base at a treatment pressure of not lower than 100 Pa and not higher than 400 Pa to generate plasma to form a DLC film on a surface of the base. Hexamethyldisiloxane, for example, is used as the oxygen-containing organic silicon compound. A DC pulse voltage, for example, is applied to the base in the DLC film forming step.
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