发明申请
US20130064978A1 VACUUM ROLL-TO-ROLL DEVICE AND MANUFACTURING METHOD FOR ROLL-TYPE SUBSTRATE 有权
真空辊轧辊装置及其制造方法

VACUUM ROLL-TO-ROLL DEVICE AND MANUFACTURING METHOD FOR ROLL-TYPE SUBSTRATE
摘要:
A vacuum roll-to-roll device includes: a first chamber; a second chamber neighboring the first chamber; a shutter disposed between the first chamber and the second chamber; a sealing member attached to the shutter; and a roll-type substrate which moves from the first chamber to the second chamber through the sealing member. A thickness of a lateral side of the roll-type substrate decreases in a direction toward an edge thereof.
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