Invention Application
- Patent Title: METHOD AND APPARATUS FOR FORMING ALIGNMENT FILM
- Patent Title (中): 用于形成对准膜的方法和装置
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Application No.: US13376842Application Date: 2011-10-19
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Publication No.: US20130065333A1Publication Date: 2013-03-14
- Inventor: Yizhuang Zhuang , Songxian Wen , Mingfeng Deng
- Applicant: Yizhuang Zhuang , Songxian Wen , Mingfeng Deng
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Current Assignee Address: CN Shenzhen, Guangdong
- Priority: CN201110265990.8 20110908; CNPCT/CN2011/080973 20111019
- International Application: PCT/CN11/80973 WO 20111019
- Main IPC: H01L33/08
- IPC: H01L33/08 ; H01J9/395

Abstract:
A method and an apparatus for forming an alignment film are disclosed, comprising: providing a substrate comprising a displaying region and a non-displaying region; spraying an alignment liquid onto the displaying region of the substrate; disposing an interference plate directly above the substrate; moving the interference plate downward in the upper surface of the substrate to a level equal to an average thickness of the alignment liquid so as to promote quick and uniform diffusion of the alignment liquid in the displaying region; and baking the uniformly diffused alignment liquid to form the alignment film. By using the interference plate to limit the height of the alignment liquid after the alignment liquid is sprayed, the thickness of the alignment film is guaranteed and uniform diffusion of the alignment liquid is promoted. This enhances the uniformity of the alignment film and improves both the displaying performance and the production efficiency.
Information query
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