发明申请
US20130068018A1 MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM 有权
MICROMACHINED GYROSCOPE包括引导质量系统

  • 专利标题: MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM
  • 专利标题(中): MICROMACHINED GYROSCOPE包括引导质量系统
  • 申请号: US13235296
    申请日: 2011-09-16
  • 公开(公告)号: US20130068018A1
    公开(公告)日: 2013-03-21
  • 发明人: Joseph SEEGEROzan ANAC
  • 申请人: Joseph SEEGEROzan ANAC
  • 申请人地址: US CA Sunnyvale
  • 专利权人: INVENSENSE, INC.
  • 当前专利权人: INVENSENSE, INC.
  • 当前专利权人地址: US CA Sunnyvale
  • 主分类号: G01C19/56
  • IPC分类号: G01C19/56
MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM
摘要:
A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.
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