发明申请
US20130068018A1 MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM
有权
MICROMACHINED GYROSCOPE包括引导质量系统
- 专利标题: MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM
- 专利标题(中): MICROMACHINED GYROSCOPE包括引导质量系统
-
申请号: US13235296申请日: 2011-09-16
-
公开(公告)号: US20130068018A1公开(公告)日: 2013-03-21
- 发明人: Joseph SEEGER , Ozan ANAC
- 申请人: Joseph SEEGER , Ozan ANAC
- 申请人地址: US CA Sunnyvale
- 专利权人: INVENSENSE, INC.
- 当前专利权人: INVENSENSE, INC.
- 当前专利权人地址: US CA Sunnyvale
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.
公开/授权文献
- US08833162B2 Micromachined gyroscope including a guided mass system 公开/授权日:2014-09-16
信息查询