发明申请
- 专利标题: ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
- 专利标题(中): 滚筒模制造装置及制造方法
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申请号: US13700783申请日: 2011-06-08
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公开(公告)号: US20130068734A1公开(公告)日: 2013-03-21
- 发明人: Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
- 申请人: Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
- 申请人地址: JP Osaka-shi, Osaka
- 专利权人: ASAHI KASEI KABUSHIKI KAISHA
- 当前专利权人: ASAHI KASEI KABUSHIKI KAISHA
- 当前专利权人地址: JP Osaka-shi, Osaka
- 优先权: JP2010-137226 20100616
- 国际申请: PCT/JP2011/063149 WO 20110608
- 主分类号: B29C33/38
- IPC分类号: B29C33/38
摘要:
A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
公开/授权文献
- US09000325B2 Roller mold manufacturing device and manufacturing method 公开/授权日:2015-04-07
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