发明申请
- 专利标题: LASER PROCESSING METHOD
- 专利标题(中): 激光加工方法
-
申请号: US13701031申请日: 2011-05-20
-
公开(公告)号: US20130068739A1公开(公告)日: 2013-03-21
- 发明人: Ryuji Sugiura
- 申请人: Ryuji Sugiura
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 优先权: JP2010-127045 20100602
- 国际申请: PCT/JP2011/061674 WO 20110520
- 主分类号: B23K26/38
- IPC分类号: B23K26/38
摘要:
To provide a laser processing method which is capable of enhancing the dividing performance according to a required quality. By irradiating an object to be processed with a laser light L having a pulse waveform in which its half width and its bottom width are equal to one another, a plurality of modified spots are formed along a line to cut inside the object, and a modified region is formed with the plurality of modified spots. Here, a laser light source 101 controls a drive power source 51 by a laser light source controller 102, to switch among a pulse waveform among first to third pulse waveforms according to a PE value of the laser light L. In the case of a low PE value, a first pulse waveform formed such that a peak value is located on its first half side and into a saw-blade shape is set as the pulse waveform, and in the case of a high PE value, a second pulse waveform formed such that a peak value is located on its latter half side and into a saw-blade shape is set as the pulse waveform.
公开/授权文献
- US09409256B2 Laser processing method 公开/授权日:2016-08-09