发明申请
US20130069179A1 ACOUSTIC SENSOR, ACOUSTIC TRANSDUCER, MICROPHONE USING THE ACOUSTIC TRANSDUCER, AND METHOD FOR MANUFACTURING THE ACOUSTIC TRANSDUCER
有权
声学传感器,声音传感器,使用声学传感器的麦克风以及制造声学传感器的方法
- 专利标题: ACOUSTIC SENSOR, ACOUSTIC TRANSDUCER, MICROPHONE USING THE ACOUSTIC TRANSDUCER, AND METHOD FOR MANUFACTURING THE ACOUSTIC TRANSDUCER
- 专利标题(中): 声学传感器,声音传感器,使用声学传感器的麦克风以及制造声学传感器的方法
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申请号: US13699989申请日: 2011-04-20
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公开(公告)号: US20130069179A1公开(公告)日: 2013-03-21
- 发明人: Koichi Ishimoto , Yoshitaka Tatara , Shin Inuzuka , Sebastiano Conti
- 申请人: Koichi Ishimoto , Yoshitaka Tatara , Shin Inuzuka , Sebastiano Conti
- 申请人地址: IT Agrate Brianza Milano JP Kyoto
- 专利权人: STMICROELECTRONICS SRL,OMRON CORPORATION
- 当前专利权人: STMICROELECTRONICS SRL,OMRON CORPORATION
- 当前专利权人地址: IT Agrate Brianza Milano JP Kyoto
- 优先权: JP2010-121681 20100527
- 国际申请: PCT/JP2011/059710 WO 20110420
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L21/02
摘要:
In an acoustic sensor, a conductive vibrating membrane and a fixed electrode plate are disposed above a silicon substrate with an air gap provided therebetween, and the substrate has an impurity added to a surface thereof. A microphone includes an acoustic transducer; and an acquiring section that acquires a change in pressure as detected by the acoustic transducer. A method for manufacturing an acoustic transducer including a semiconductor substrate, a vibrating membrane, which is conductive, and a fixed electrode plate and detecting a pressure according to a change in capacitance between the vibrating membrane and the fixed electrode plate, the method includes an impurity adding step of adding an impurity to a surface of the semiconductor substrate; and a forming step of forming the vibrating membrane and the fixed electrode plate above the semiconductor substrate to which the impurity has been added.
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