发明申请
US20130071575A1 COMPONENT MANIPULATOR FOR THE DYNAMIC POSITIONING OF A SUBSTRATE, COATING METHOD, AS WELL AS USE OF A COMPONENT MANIPULATOR
审中-公开
用于基板的动态定位的组件操纵器,涂层方法,如同使用组件操纵器
- 专利标题: COMPONENT MANIPULATOR FOR THE DYNAMIC POSITIONING OF A SUBSTRATE, COATING METHOD, AS WELL AS USE OF A COMPONENT MANIPULATOR
- 专利标题(中): 用于基板的动态定位的组件操纵器,涂层方法,如同使用组件操纵器
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申请号: US13419770申请日: 2012-03-14
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公开(公告)号: US20130071575A1公开(公告)日: 2013-03-21
- 发明人: Markus Müller
- 申请人: Markus Müller
- 优先权: EP11158579.0 20110317
- 主分类号: B65G49/00
- IPC分类号: B65G49/00
摘要:
The invention relates to a component manipulator for the dynamic positioning of a substrate to be treated in a thermal treatment process, wherein the component manipulator includes a main drive axle rotatable about a main rotary axis, a connection element and a substrate holder connectable to the connection element. In accordance with the invention the connection element is a ceramic connection element and a connection segment of the substrate holder is connectable to the connection element in a pull resistant and rotationally fixed manner by means of a plug and rotate connection with regard to a connection axis (V) of the plug and rotate connection and the substrate holder (5) is arranged rotatable about the connection axis (V). The invention further relates to a coating method, to a coating apparatus, as well as to the use of a component manipulator.
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