Invention Application
- Patent Title: THIN-FILM SOLAR CELL MANUFACTURING SYSTEM
- Patent Title (中): 薄膜太阳能电池制造系统
-
Application No.: US13449317Application Date: 2012-04-18
-
Publication No.: US20130074772A1Publication Date: 2013-03-28
- Inventor: Shih-Wei Lee , Yao-Tsang Tsai , Ming-Hung Lin
- Applicant: Shih-Wei Lee , Yao-Tsang Tsai , Ming-Hung Lin
- Applicant Address: TW Pingtung County
- Assignee: Axuntek Solar Energy
- Current Assignee: Axuntek Solar Energy
- Current Assignee Address: TW Pingtung County
- Priority: TW100134778 20110927
- Main IPC: C23C16/458
- IPC: C23C16/458

Abstract:
A manufacturing system for thin-film solar cell is disclosed in the present invention. The manufacturing system includes a chamber, a boat disposed inside the chamber, a solid substrate with a first precursor which has a first I B group and III A group, and a flexible substrate with a second precursor which has a second I B group and III A group, a gas controller for pouring reactant gas, and a heater for increasing the temperature of the chamber, so that the reactant gas reacts to the first precursor and the second precursor to form a chalcopyrite structure.
Information query
IPC分类: