发明申请
- 专利标题: PROGRAMMABLE ARRAY OF SILICON NANOWIRE FIELD EFFECT TRANSISTOR AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 硅纳米管场效应晶体管的可编程阵列及其制造方法
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申请号: US13503240申请日: 2011-11-18
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公开(公告)号: US20130075701A1公开(公告)日: 2013-03-28
- 发明人: Ru Huang , Jibin Zou , Runsheng Wang , Jiewen Fan , Changze Liu , Yangyuan Wang
- 申请人: Ru Huang , Jibin Zou , Runsheng Wang , Jiewen Fan , Changze Liu , Yangyuan Wang
- 申请人地址: CN BEIJING
- 专利权人: PEKING UNIVERSITY
- 当前专利权人: PEKING UNIVERSITY
- 当前专利权人地址: CN BEIJING
- 优先权: CN201110089699.X 20110411
- 国际申请: PCT/CN2011/082465 WO 20111118
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
The present invention discloses a hexagonal programmable array based on a silicon nanowire field effect transistor and a method for fabricating the same. The array includes a nanowire device, a nanowire device connection region and a gate connection region, wherein, the nanowire device has a cylinder shape, and includes a silicon nanowire channel, a gate dielectric layer, and a gate region, the nanowire channel being surrounded by the gate dielectric layer, and the gate dielectric layer being surrounded by the gate region; the nanowire devices are arranged in a hexagon shape to form programming unit, the nanowire device connection region is a connection node of three nanowire devices and secured to a silicon supporter. The present invention can achieve a complex control logic of interconnections and is suitable for a digital/analog and a mixed-signal circuit having a high integration degree and a high speed.
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