Invention Application
- Patent Title: SILICON INTERPOSER INCLUDING BACKSIDE INDUCTOR
- Patent Title (中): 硅绝缘子,包括背面电感器
-
Application No.: US13493458Application Date: 2012-06-11
-
Publication No.: US20130087884A1Publication Date: 2013-04-11
- Inventor: Hyun-Cheol BAE , Kwang-Seong CHOI , Jong Tae Moon , Jong-Moon PARK
- Applicant: Hyun-Cheol BAE , Kwang-Seong CHOI , Jong Tae Moon , Jong-Moon PARK
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2011-0102108 20111006
- Main IPC: H01L27/08
- IPC: H01L27/08

Abstract:
Disclosed is a silicon interposer that can reduce the entire area of a semiconductor package and increase the degree of integration by forming inductors at a lower part in addition to an upper part of a silicon substrate. The silicon interposer includes a silicon substrate, an upper inductor layer formed at the upper part of the silicon substrate and a lower inductor layer formed at the lower part of the silicon substrate.
Public/Granted literature
- US08723292B2 Silicon interposer including backside inductor Public/Granted day:2014-05-13
Information query
IPC分类: