发明申请
- 专利标题: ACTIVE MATRIX SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 主动矩阵基板及其制造方法
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申请号: US13521316申请日: 2011-01-12
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公开(公告)号: US20130092923A1公开(公告)日: 2013-04-18
- 发明人: Takeshi Hara , Hirohiko Nishiki , Yoshifumi Ohta , Yuuji Mizuno , Yoshimasa Chikama , Tetsuya Aita , Masahiko Suzuki , Michiko Takei , Okifumi Nakagawa , Yoshiyuki Harumoto
- 申请人: Takeshi Hara , Hirohiko Nishiki , Yoshifumi Ohta , Yoshimasa Chikama , Tetsuya Aita , Masahiko Suzuki , Michiko Takei , Okifumi Nakagawa , Yoshiyuki Harumoto , Hinae Mizuno
- 申请人地址: JP Osaka-shi, Osaka
- 专利权人: SHARP KABUSHIKI KAISHA
- 当前专利权人: SHARP KABUSHIKI KAISHA
- 当前专利权人地址: JP Osaka-shi, Osaka
- 优先权: JP2010-005199 20100113
- 国际申请: PCT/JP2011/000104 WO 20110112
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/66
摘要:
An active matrix substrate includes a plurality of pixel electrodes (19a) arranged in a matrix, and a plurality of TFTs (5a) connected to the respective corresponding pixel electrodes (19a). Each TFT (5a) includes a gate electrode (11aa) provided on an insulating substrate (10a), a gate insulating layer (12) covering the gate electrode (11aa), an oxide semiconductor layer (13a) provided on the gate insulating layer (12) over the gate electrode (11aa) and having a channel region (C), and a source electrode (16aa) and a drain electrode (16b) provided on the oxide semiconductor layer (13a), overlapping the gate electrode (11aa) and facing each other with the channel region (C) being interposed between the source and drain electrodes. A protection insulating layer (17) made of a spin-on glass material is provided on the channel region (C) of the oxide semiconductor layer (13a).
公开/授权文献
- US1224850A Combined police club and whistle. 公开/授权日:1917-05-01
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