发明申请
- 专利标题： LASER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD FOR GENERATING LASER BEAM
- 专利标题（中）： 激光装置，极光紫外线发光系统及其生成激光束的方法
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申请号： US13805300申请日： 2012-03-05
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公开(公告)号： US20130099140A1公开(公告)日： 2013-04-25
- 发明人: Hiroaki Nakarai , Osamu Wakabayashi , Hideo Hoshino
- 申请人： Hiroaki Nakarai , Osamu Wakabayashi , Hideo Hoshino
- 申请人地址： JP Oyama-shi, Tochigi
- 专利权人： GIGAPHOTON INC.
- 当前专利权人： GIGAPHOTON INC.
- 当前专利权人地址： JP Oyama-shi, Tochigi
- 优先权： JP2011-075700 20110330; JP2012-004220 20120112
- 国际申请： PCT/IB12/00409 WO 20120305
- 主分类号： H01S3/00
- IPC分类号： H01S3/00
摘要：
A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam, at least one power source for varying an excitation intensity in the at least one amplifier, and a controller configured to control the pulse energy adjusting unit on a pulse-to-pulse basis for the pulse laser beam passing therethrough and to control the at least one power source for a group of multiple pulses of the pulse laser beam.
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