Invention Application
- Patent Title: SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD THEREFOR
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Application No.: US13807065Application Date: 2011-06-21
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Publication No.: US20130099291A1Publication Date: 2013-04-25
- Inventor: Mineo Shimotsusa , Fumihiro Inui
- Applicant: Mineo Shimotsusa , Fumihiro Inui
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Priority: JP2010-149476 20100630
- International Application: PCT/JP2011/003530 WO 20110621
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A solid-state imaging device includes a first and second pixel regions. In the first pixel region, a photoelectric conversion unit, a floating diffusion region (FD), and a transferring transistor are provided. In the second pixel region, an amplifying transistor, and a resetting transistor are provided. A first element isolation portion is provided in the first pixel region, while a second element isolation portion is provided in the second pixel region. An amount of protrusion of an insulating film into a semiconductor substrate in the first element isolation portion is smaller, than that in the second element isolation portion.
Public/Granted literature
- US08928041B2 Solid-state imaging device and manufacturing method therefor Public/Granted day:2015-01-06
Information query
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