发明申请
- 专利标题: METHOD OF MANUFACTURING THE THIN-FILM MAGNETIC HEAD, THE THIN-FILM MAGNETIC HEAD, HEAD GIMBAL ASSEMBLY AND HARD DISK DRIVE
- 专利标题(中): 制造薄膜磁头,薄膜磁头,头盖组件和硬盘驱动器的方法
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申请号: US13279978申请日: 2011-10-24
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公开(公告)号: US20130100555A1公开(公告)日: 2013-04-25
- 发明人: Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuki SATO , Atsushi IIJIMA
- 申请人: Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuki SATO , Atsushi IIJIMA
- 申请人地址: CN HONG KONG US CA MILPITAS
- 专利权人: SAE MAGNETICS (H.K.) LTD.,HEADWAY TECHNOLOGIES, INC.
- 当前专利权人: SAE MAGNETICS (H.K.) LTD.,HEADWAY TECHNOLOGIES, INC.
- 当前专利权人地址: CN HONG KONG US CA MILPITAS
- 主分类号: G11B5/31
- IPC分类号: G11B5/31 ; G11B5/127 ; G11B5/48
摘要:
A thin-film magnetic head is constructed such that a main magnetic pole layer, a lower shield layer, an upper shield layer and a thin-film coil are laminated on a substrate. A method of manufacturing the thin-film magnetic head has a lower shield layer forming step. This step comprises a step of forming a first lower shield part in a lower shield planned area, including a planned line along the medium-opposing surface, a step of forming a partial lower seed layer having a partial arrangement structure in which the partial lower seed layer is arranged on a lower formation zone except a lower exception zone including the planned line, a step of forming a second lower shield part on the partial lower seed layer.
公开/授权文献
- US08499435B2 Method of manufacturing a thin-film magnetic head 公开/授权日:2013-08-06
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