发明申请
US20130100555A1 METHOD OF MANUFACTURING THE THIN-FILM MAGNETIC HEAD, THE THIN-FILM MAGNETIC HEAD, HEAD GIMBAL ASSEMBLY AND HARD DISK DRIVE 有权
制造薄膜磁头,薄膜磁头,头盖组件和硬盘驱动器的方法

METHOD OF MANUFACTURING THE THIN-FILM MAGNETIC HEAD, THE THIN-FILM MAGNETIC HEAD, HEAD GIMBAL ASSEMBLY AND HARD DISK DRIVE
摘要:
A thin-film magnetic head is constructed such that a main magnetic pole layer, a lower shield layer, an upper shield layer and a thin-film coil are laminated on a substrate. A method of manufacturing the thin-film magnetic head has a lower shield layer forming step. This step comprises a step of forming a first lower shield part in a lower shield planned area, including a planned line along the medium-opposing surface, a step of forming a partial lower seed layer having a partial arrangement structure in which the partial lower seed layer is arranged on a lower formation zone except a lower exception zone including the planned line, a step of forming a second lower shield part on the partial lower seed layer.
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