发明申请
- 专利标题: LAMINATED SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE, LAMINATED CHIP PACKAGE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 层叠半导体基板,半导体基板,层压芯片封装及其制造方法
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申请号: US13286728申请日: 2011-11-01
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公开(公告)号: US20130105949A1公开(公告)日: 2013-05-02
- 发明人: Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuki SATO , Atsushi IIJIMA
- 申请人: Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuki SATO , Atsushi IIJIMA
- 申请人地址: CN Hong Kong US CA Milpitas
- 专利权人: SAE MAGNETICS (H.K.) LTD.,HEADWAY TECHNOLOGIES, INC.
- 当前专利权人: SAE MAGNETICS (H.K.) LTD.,HEADWAY TECHNOLOGIES, INC.
- 当前专利权人地址: CN Hong Kong US CA Milpitas
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/78 ; H01L21/762
摘要:
In a laminated semiconductor substrate, a plurality of semiconductor substrates are laminated. Each of the semiconductor substrate has a plurality of scribe-groove parts formed along scribe lines. Further, each of the semiconductor substrate has a plurality of device regions having a semiconductor device formed therein and insulated from each other, and a plurality of wiring electrodes connected to the semiconductor devices respectively formed in the plurality of device regions and extending from the device regions into the inside of the scribe-groove parts. The plurality of wiring electrodes are arranged in a partial arrangement pattern in which the wiring electrodes are arranged along only a part of four boundary sides, corresponding to boundaries between each of the device regions and the scribe-groove parts. Further, the plurality of wiring electrodes extend into the scribe-groove part from only one of two device regions adjacent to each other with the scribe-groove part therebetween.
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