发明申请
US20130107346A1 OPTICAL SYSTEM FOR LASER OPTICAL RECTIFICATION AND WAVE FRONT CONTROL 有权
用于激光光学校正和波前控制的光学系统

  • 专利标题: OPTICAL SYSTEM FOR LASER OPTICAL RECTIFICATION AND WAVE FRONT CONTROL
  • 专利标题(中): 用于激光光学校正和波前控制的光学系统
  • 申请号: US13809468
    申请日: 2011-07-13
  • 公开(公告)号: US20130107346A1
    公开(公告)日: 2013-05-02
  • 发明人: Haruyasu ItoTakashi Yasuda
  • 申请人: Haruyasu ItoTakashi Yasuda
  • 申请人地址: JP Hamamatsu-shi, Shizuoka
  • 专利权人: HAMAMATSU PHOTONICS K.K.
  • 当前专利权人: HAMAMATSU PHOTONICS K.K.
  • 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
  • 优先权: JP2010-174688 20100803
  • 国际申请: PCT/JP2011/065973 WO 20110713
  • 主分类号: G02F1/01
  • IPC分类号: G02F1/01
OPTICAL SYSTEM FOR LASER OPTICAL RECTIFICATION AND WAVE FRONT CONTROL
摘要:
A laser light shaping and wavefront controlling optical system 1 in accordance with an embodiment of the present invention comprises an intensity conversion lens 24 for converting and shaping an intensity distribution of laser light incident thereon into a desirable intensity distribution; an optical modulation device 34 for modulating the laser light emitted from the intensity conversion lens 24 so as to control a wavefront thereof; a condenser optical system 36 for converging the laser light issued from the optical modulation device 34; and an image-forming optical system 30, arranged between the optical modulation device 34 and the condenser optical system 36, having an entrance-side imaging plane between a plane 24x where the laser light emitted from the intensity conversion lens 24 attains the desirable intensity distribution and a modulation plane 34a of the optical modulation device 34 and an exit-side imaging plane on a pupil plane 36a of the condenser optical system 36.
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