发明申请
US20130108792A1 LOADING AND UNLOADING SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF
审中-公开
用于薄膜形成的装载和卸载系统及其方法
- 专利标题: LOADING AND UNLOADING SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF
- 专利标题(中): 用于薄膜形成的装载和卸载系统及其方法
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申请号: US13282125申请日: 2011-10-26
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公开(公告)号: US20130108792A1公开(公告)日: 2013-05-02
- 发明人: Cheng Chieh Yang
- 申请人: Cheng Chieh Yang
- 申请人地址: TW Taipei City
- 专利权人: PINECONE MATERIAL INC.
- 当前专利权人: PINECONE MATERIAL INC.
- 当前专利权人地址: TW Taipei City
- 主分类号: B05C13/00
- IPC分类号: B05C13/00 ; B05D1/00 ; B05D1/36 ; B05C5/00
摘要:
A system for forming one or more layers of material on one or more substrates is described. The system includes a vacuum chamber and a showerhead located in the vacuum chamber. A door in a wall of the vacuum chamber allows for loading and unloading of the one or more substrates in the vacuum chamber while under vacuum. A drive mechanism coupled to the showerhead moves the showerhead between a first position and a second position while under vacuum. In the first position, the showerhead is positioned to allow access to the door for loading and unloading of the one or more substrates through the door. In the second position, the showerhead is positioned to inhibit access to the door inside the vacuum chamber.