发明申请
- 专利标题: SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF
- 专利标题(中): 扫描传输电子显微镜及其轴向调整方法
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申请号: US13808134申请日: 2011-07-11
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公开(公告)号: US20130112875A1公开(公告)日: 2013-05-09
- 发明人: Kuniyasu Nakamura , Hiromi Inada
- 申请人: Kuniyasu Nakamura , Hiromi Inada
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-167687 20100727
- 国际申请: PCT/JP2011/065790 WO 20110711
- 主分类号: H01J37/26
- IPC分类号: H01J37/26 ; H01J37/28
摘要:
A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
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