Invention Application
- Patent Title: SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF
- Patent Title (中): 扫描传输电子显微镜及其轴向调整方法
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Application No.: US13808134Application Date: 2011-07-11
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Publication No.: US20130112875A1Publication Date: 2013-05-09
- Inventor: Kuniyasu Nakamura , Hiromi Inada
- Applicant: Kuniyasu Nakamura , Hiromi Inada
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-167687 20100727
- International Application: PCT/JP2011/065790 WO 20110711
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28

Abstract:
A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
Public/Granted literature
- US08710438B2 Scanning transmission electron microscope and axial adjustment method thereof Public/Granted day:2014-04-29
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