Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US13726088Application Date: 2012-12-22
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Publication No.: US20130113035A1Publication Date: 2013-05-09
- Inventor: Yoshiyuki KAWASHIMA , Keiichi HARAGUCHI
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kawasaki-shi
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Kawasaki-shi
- Priority: JP2009-027604 20090209
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
To provide a technique capable of improving reliability of a semiconductor device having a nonvolatile memory cell by suppressing the reduction of the drive force.A memory cell is configured by a selection pMIS having a selection gate electrode including a conductive film exhibiting a p-type conductivity and a memory pMIS having a memory gate electrode including a conductive film exhibiting a p-type conductivity, and at the time of write, hot electrons are injected into a charge storage layer from the side of a semiconductor substrate 1 and at the time of erase, hot holes are injected into the charge storage layer from the memory gate electrode.
Information query
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