Invention Application
- Patent Title: ROTATING TYPE THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD USED BY THE SAME
- Patent Title (中): 旋转式薄膜沉积装置及其使用的薄膜沉积方法
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Application No.: US13443268Application Date: 2012-04-10
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Publication No.: US20130115373A1Publication Date: 2013-05-09
- Inventor: Jin-Kwang Kim , Sang-Joon Seo , Seung-Hun Kim
- Applicant: Jin-Kwang Kim , Sang-Joon Seo , Seung-Hun Kim
- Applicant Address: KR Yongin-Cit
- Assignee: SAMSUNG MOBILE DISPLAY CO., LTD.
- Current Assignee: SAMSUNG MOBILE DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-Cit
- Priority: KR10-2011-0114126 20111103
- Main IPC: C23C16/458
- IPC: C23C16/458

Abstract:
A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition apparatus are provided. The rotating type thin film deposition apparatus includes a deposition device; a circulation running unit that runs a deposition target on a circulation track via a deposition region of the deposition device; and a support unit that supports the deposition target and moves along the circulation track. Thin layers can be precisely and uniformly formed on the entire surface of a deposition target, and since deposition is performed while a plurality of deposition targets move along a caterpillar track, a working speed is faster compared to a method involving a general reciprocating motion, and the size of the thin film deposition apparatus can be reduced.
Public/Granted literature
- US09028613B2 Rotating type thin film deposition apparatus and thin film deposition method used by the same Public/Granted day:2015-05-12
Information query
IPC分类: