Invention Application
US20130119447A1 NON-UNIFORM GATE DIELECTRIC CHARGE FOR PIXEL SENSOR CELLS AND METHODS OF MANUFACTURING
有权
像差传感器电池的非均匀栅极电介质电荷及其制造方法
- Patent Title: NON-UNIFORM GATE DIELECTRIC CHARGE FOR PIXEL SENSOR CELLS AND METHODS OF MANUFACTURING
- Patent Title (中): 像差传感器电池的非均匀栅极电介质电荷及其制造方法
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Application No.: US13736505Application Date: 2013-01-08
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Publication No.: US20130119447A1Publication Date: 2013-05-16
- Inventor: Brent A. ANDERSON , Andres BRYANT , William F. CLARK, JR. , John J. ELLIS-MONAGHAN , Edward J. NOWAK
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L31/02
- IPC: H01L31/02

Abstract:
A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric.
Public/Granted literature
- US08610185B2 Non-uniform gate dielectric charge for pixel sensor cells and methods of manufacturing Public/Granted day:2013-12-17
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