Invention Application
- Patent Title: Particle Detector and Method for Producing Such A Detector
- Patent Title (中): 颗粒检测器及其生产方法
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Application No.: US13811499Application Date: 2011-07-19
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Publication No.: US20130120749A1Publication Date: 2013-05-16
- Inventor: Sergio Nicoletti
- Applicant: Sergio Nicoletti
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee Address: FR Paris
- Priority: FR1003081 20100722
- International Application: PCT/IB2011/053213 WO 20110719
- Main IPC: G01N15/02
- IPC: G01N15/02 ; G01N15/06
Abstract:
The invention relates to a particle detector including a substrate (10, 30, 40) made of a semiconductor material, in which at least one through-cavity (11, 31, 41) is formed, defined by an input section (110) and an output section (111), wherein the input section thereof is to be connected to an airflow source, said substrate supporting: an optical means including at least one laser source (12, 32, 42), and at least one waveguide (13, 33, 43) connected to said at least one laser source and leading into the vicinity of the output section of said cavity; and photodetector means (14, 34, 44) located near the output section of said cavity and offset relative to the optical axis of the optical means.
Public/Granted literature
- US08867035B2 Particle detector and method for producing such a detector Public/Granted day:2014-10-21
Information query
