发明申请
- 专利标题： Particle Detector and Method for Producing Such A Detector
- 专利标题（中）： 颗粒检测器及其生产方法
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申请号： US13811499申请日： 2011-07-19
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公开(公告)号： US20130120749A1公开(公告)日： 2013-05-16
- 发明人: Sergio Nicoletti
- 申请人： Sergio Nicoletti
- 申请人地址： FR Paris
- 专利权人： Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- 当前专利权人： Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- 当前专利权人地址： FR Paris
- 优先权： FR1003081 20100722
- 国际申请： PCT/IB2011/053213 WO 20110719
- 主分类号： G01N15/02
- IPC分类号： G01N15/02 ; G01N15/06
摘要：
The invention relates to a particle detector including a substrate (10, 30, 40) made of a semiconductor material, in which at least one through-cavity (11, 31, 41) is formed, defined by an input section (110) and an output section (111), wherein the input section thereof is to be connected to an airflow source, said substrate supporting: an optical means including at least one laser source (12, 32, 42), and at least one waveguide (13, 33, 43) connected to said at least one laser source and leading into the vicinity of the output section of said cavity; and photodetector means (14, 34, 44) located near the output section of said cavity and offset relative to the optical axis of the optical means.
公开/授权文献
- US08867035B2 Particle detector and method for producing such a detector 公开/授权日：2014-10-21
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