发明申请
- 专利标题： ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME
- 专利标题（中）： 机电传感器及其制造方法
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申请号： US13813396申请日： 2011-07-26
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公开(公告)号： US20130126993A1公开(公告)日： 2013-05-23
- 发明人: Kazutoshi Torashima , Takahiro Akiyama
- 申请人： Kazutoshi Torashima , Takahiro Akiyama
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-173659 20100802
- 国际申请： PCT/JP2011/067579 WO 20110726
- 主分类号： H01L21/18
- IPC分类号： H01L21/18 ; B81B3/00
摘要：
The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film.The electromechanical transducer includes a plurality of elements each having at least one cell. An insulating layer is formed on a first substrate, and gaps are formed in the insulating layer. A second substrate is bonded to the insulating layer provided with the gaps. Then, dividing grooves are formed in the first substrate and are at least partially filled with an insulating member. Then, the thickness of the second substrate bonded to the insulating layer is reduced to form a film.