发明申请
- 专利标题: DISK TYPE MEMS RESONATOR
- 专利标题(中): 盘式MEMS谐振器
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申请号: US13814736申请日: 2011-06-13
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公开(公告)号: US20130134829A1公开(公告)日: 2013-05-30
- 发明人: Takefumi Saito , Noritoshi Kimura
- 申请人: Takefumi Saito , Noritoshi Kimura
- 申请人地址: JP TOKYO
- 专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人地址: JP TOKYO
- 优先权: JP2010-180357 20100811
- 国际申请: PCT/JP2011/063992 WO 20110613
- 主分类号: H02N1/00
- IPC分类号: H02N1/00
摘要:
A variation in a resonance frequency due to variation in dimension accuracy of the supporting structure of the vibrating unit is reduced, and energy loss leaked from the supporting structure is reduced as much as possible. The electrostatic drive disk-type MEMS vibrator includes: a disk type vibrating unit; drive electrodes disposed at a prescribed gap g from the peripheral portion of the disk type vibrating unit and disposed at both sides of the vibrating unit so as to face each other; a unit for applying alternating current bias voltages of the same phase to the drive electrodes; and detection units that obtain outputs corresponding to the capacitance between the disk type vibrating unit and the drive electrodes. The disk type vibrating unit is supported by a pillar-shaped supporting structure disposed upright at the center of the disk and a transverse cross-sectional shape of the supporting structure is non-circular.