发明申请
- 专利标题: PIEZOELECTRIC MEMS TRANSFORMER
- 专利标题(中): 压电MEMS变压器
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申请号: US13305293申请日: 2011-11-28
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公开(公告)号: US20130134838A1公开(公告)日: 2013-05-30
- 发明人: Changhan Hobie Yun , Chi Shun Lo , Chengjie Zuo , Jonghae Kim
- 申请人: Changhan Hobie Yun , Chi Shun Lo , Chengjie Zuo , Jonghae Kim
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人: QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01L41/107
- IPC分类号: H01L41/107 ; H01L41/22
摘要:
This disclosure provides implementations of electromechanical systems piezoelectric resonator transformers, devices, apparatus, systems, and related processes. In one aspect, a transformer includes a piezoelectric layer; a first conductive layer arranged over a first surface of the piezoelectric layer including a first set of electrodes and a second set of electrodes interdigitated with the first set. The transformer includes a second conductive layer arranged over a second surface including at least a third set of electrodes. In some implementations, the transformer includes a first port capable of receiving an input signal and to which the first set of electrodes are coupled, and a second port capable of being coupled to a load and of outputting an output signal, the second set of electrodes being coupled to the second port. Generally, a ratio of the number of electrodes of the second set to the first set characterizes a transformation ratio.