发明申请
US20130135395A1 SILICON SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND INKJET PRINT HEAD 审中-公开
硅基板,其制造方法和喷墨打印头

SILICON SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND INKJET PRINT HEAD
摘要:
There is provided a silicon substrate including: a first connection part connected to a manifold and having a first width of a first size; a second connection part connected to a pressure chamber and having a second width of a second size; and a restrictor part connecting the first connection part to the second connection part and having a third width of a third size smaller than the first size or the second size, wherein a boundary part connecting the restrictor part to the first connection part or the restrictor part to the second connection part is formed to be curved.
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