发明申请
- 专利标题: Methods For Controlling Displacement Of Bearings In A Wire Saw
- 专利标题(中): 控制线锯中轴承位移的方法
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申请号: US13309270申请日: 2011-12-01
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公开(公告)号: US20130139801A1公开(公告)日: 2013-06-06
- 发明人: Carlo Zavattari , Ferdinando Severico , Sumeet S. Bhagavat , Gabriele Vercelloni , Roland R. Vandamme
- 申请人: Carlo Zavattari , Ferdinando Severico , Sumeet S. Bhagavat , Gabriele Vercelloni , Roland R. Vandamme
- 申请人地址: IT Novara
- 专利权人: MEMC ELECTRONIC MATERIALS, SPA
- 当前专利权人: MEMC ELECTRONIC MATERIALS, SPA
- 当前专利权人地址: IT Novara
- 主分类号: B28D5/00
- IPC分类号: B28D5/00 ; B28D1/10
摘要:
Methods are disclosed for controlling the displacement of bearings in a wire saw machine. The systems and methods described herein are generally operable to alter the nanotopology of wafers sliced from an ingot by controlling the shape of the wafers. The shape of the wafers is altered by controlling displacement of bearings in the wire saw by changing the temperature and/or flow rate of a temperature-controlling fluid circulated in fluid communication with bearings supporting wire guides of the saw. Different feedback systems can be used to determine the temperature of the fluid necessary to generate wafers having the desired shape and/or nanotopology.
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