发明申请
- 专利标题： MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS
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申请号： US13681904申请日： 2012-11-20
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公开(公告)号： US20130140944A1公开(公告)日： 2013-06-06
- 发明人: David M. Chen , Jan H. Kuypers , Pritiraj Mohanty , Klaus Juergen Schoepf , Guiti Zolfagharkhani , Jason Goodelle , Reimund Rebel
- 申请人： David M. Chen , Jan H. Kuypers , Pritiraj Mohanty , Klaus Juergen Schoepf , Guiti Zolfagharkhani , Jason Goodelle , Reimund Rebel
- 申请人地址： US MA Cambridge
- 专利权人： Sand 9, Inc.
- 当前专利权人： Sand 9, Inc.
- 当前专利权人地址： US MA Cambridge
- 主分类号： H02N1/00
- IPC分类号： H02N1/00
摘要：
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
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