发明申请
- 专利标题: VACUUM CHAMBER ASSEMBLY FOR SUPPORTING A WORKPIECE
- 专利标题(中): 真空室组件用于支持工作
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申请号: US13818567申请日: 2011-08-23
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公开(公告)号: US20130155385A1公开(公告)日: 2013-06-20
- 发明人: Fardad Hashemi , Douglas C. Watson
- 申请人: Fardad Hashemi , Douglas C. Watson
- 申请人地址: JP Tokyo
- 专利权人: NIKON CORPORATION
- 当前专利权人: NIKON CORPORATION
- 当前专利权人地址: JP Tokyo
- 国际申请: PCT/US2011/048862 WO 20110823
- 主分类号: G03B27/64
- IPC分类号: G03B27/64
摘要:
A chamber assembly (26) for providing a sealed chamber (40) adjacent to a workpiece (28) to counteract the influence of gravity on the workpiece (28) includes a chamber housing (244), and a seal assembly (33) that expands and/or contracts to better seal against the workpiece (28). Further, the chamber assembly (26) can include one or more transducer assemblies (34) that expand or contract to quickly respond to leaks or injections of fluid in chamber assembly (26) to maintain a constant and stable chamber pressure in the chamber assembly (26). Moreover, the chamber assembly (26) can utilize a pressure source (35) that directs a lager amount of fluid (374) through a fluid passageway (368) to accurately maintain the pressure within the chamber assembly (26).
公开/授权文献
- US09341942B2 Vacuum chamber assembly for supporting a workpiece 公开/授权日:2016-05-17
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